11 months ago
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Micromachines, Vol. 14, Pages 945: Surface Acoustic Wave Humidity Sensor: A Review
Micromachines doi: 10.3390/mi14050945
Authors: Maria Muzamil Memon Qiong Liu Ali Manthar Tao Wang Wanli Zhang
The Growing demands for humidity detection in commercial and industrial applications led to the rapid development of humidity sensors based on different techniques. Surface acoustic wave (SAW) technology is one of these methods that has been found to provide a powerful platform for humidity sensing owing to its intrinsic features, including small size, high sensitivity, and simple operational mechanism. Similar to other techniques, the principle of humidity sensing in SAW devices is also realized by an overlaid sensitive film, which serves as the core element whose interaction with water molecules is responsible for overall performance. Therefore, most researchers are focused on exploring different sensing materials to achieve optimum performance characteristics. This article reviews sensing materials used to develop SAW humidity sensors and their responses based on theoretical aspects and experimental outcomes. Herein the influence of overlaid sensing film on the performance parameters of the SAW device, such as quality factor, signal amplitude, insertion loss, etc., is also highlighted. Lastly, a recommendation to minimize the significant change in device characteristics is presented, which we believe will be a good step for the future development of SAW humidity sensors.
